JPH0417420Y2 - - Google Patents

Info

Publication number
JPH0417420Y2
JPH0417420Y2 JP1984066133U JP6613384U JPH0417420Y2 JP H0417420 Y2 JPH0417420 Y2 JP H0417420Y2 JP 1984066133 U JP1984066133 U JP 1984066133U JP 6613384 U JP6613384 U JP 6613384U JP H0417420 Y2 JPH0417420 Y2 JP H0417420Y2
Authority
JP
Japan
Prior art keywords
air
duct
side walls
transport
rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984066133U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60178270U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6613384U priority Critical patent/JPS60178270U/ja
Publication of JPS60178270U publication Critical patent/JPS60178270U/ja
Application granted granted Critical
Publication of JPH0417420Y2 publication Critical patent/JPH0417420Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Framework For Endless Conveyors (AREA)
JP6613384U 1984-05-08 1984-05-08 空気清浄室内を走行する搬送台車の走行案内装置 Granted JPS60178270U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6613384U JPS60178270U (ja) 1984-05-08 1984-05-08 空気清浄室内を走行する搬送台車の走行案内装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6613384U JPS60178270U (ja) 1984-05-08 1984-05-08 空気清浄室内を走行する搬送台車の走行案内装置

Publications (2)

Publication Number Publication Date
JPS60178270U JPS60178270U (ja) 1985-11-27
JPH0417420Y2 true JPH0417420Y2 (en]) 1992-04-17

Family

ID=30598749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6613384U Granted JPS60178270U (ja) 1984-05-08 1984-05-08 空気清浄室内を走行する搬送台車の走行案内装置

Country Status (1)

Country Link
JP (1) JPS60178270U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62116349A (ja) * 1985-11-14 1987-05-27 三菱電機株式会社 搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247282A (en) * 1975-10-09 1977-04-14 Fuji Electric Co Ltd Electric car truck
JPS5939103Y2 (ja) * 1980-08-05 1984-10-31 株式会社ダイフク 荷搬送設備
JPS58147867U (ja) * 1982-03-30 1983-10-04 日本電気ホームエレクトロニクス株式会社 運搬装置

Also Published As

Publication number Publication date
JPS60178270U (ja) 1985-11-27

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